Initial Frequency Degradation and Variation on Ring Oscillators from Plasma Induced Damage in Fully-Depleted Silicon on Insulator Process

نویسندگان

  • Ryo Kishida
  • Azusa Oshima
  • Michitarou Yabuuchi
  • Kazutoshi Kobayashi
چکیده

Degradations of reliability caused by plasma induced damage (PID) have become a significant concern with miniaturizing a device size. In this paper, we measure frequencies of ring oscillators with an antenna structure on a single stage. PID is relieved by connecting an antenna to a drain because charge flows to a substrate. The difference of initial frequencies is 0.64 % between structures which cause and relieve PID. Initial frequencies are degraded by PID. Standard deviations are almost equivalent among antenna structures. The variation from PID is smaller than the other variations such as random dopant fluctuation.

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تاریخ انتشار 2014